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Results:
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Results: 2
Heteroepitaxial growth of 3C-SiC on SOI for sensor applications
Authors:
Krotz, G Moller, H Eickhoff, M Zappe, S Ziermann, R Obermeier, E Stoemenos, J
Citation:
G. Krotz et al., Heteroepitaxial growth of 3C-SiC on SOI for sensor applications, MAT SCI E B, 61-2, 1999, pp. 516-521
Stabilization of the 3C-SiC/SOI system by an intermediate silicon nitride layer
Authors:
Zappe, S Obermeier, E Stoemenos, J Moller, H Krotz, G Wirth, H Skorupa, W
Citation:
S. Zappe et al., Stabilization of the 3C-SiC/SOI system by an intermediate silicon nitride layer, MAT SCI E B, 61-2, 1999, pp. 522-525
Risultati:
1-2
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