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Results:
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Results: 1
Characterization of Si(100) surface after high density HBr/Cl-2/O-2 plasmaetching
Authors:
Low, CH Chin, WS Tan, KL Loh, FC Zhou, MS Zhong, QH Chan, LH
Citation:
Ch. Low et al., Characterization of Si(100) surface after high density HBr/Cl-2/O-2 plasmaetching, JPN J A P 1, 39(1), 2000, pp. 14-19
Risultati:
1-1
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