Authors: Loke, ALS Wetzel, JT Townsend, PH Tanabe, T Vrtis, RN Zussman, MP Kumar, D Ryu, C Wong, SS

Citation: Als. Loke et al., Kinetics of copper drift in low-kappa polymer interlevel dielectrics, IEEE DEVICE, 46(11), 1999, pp. 2178-2187