Authors: da Costa, MEHM Freire, FL Jacobsohn, LG Franceschini, D Mariotto, G Baumvol, IRJ

Citation: Mehm. Da Costa et al., Fluorine incorporation into amorphous hydrogenated carbon films deposited by plasma-enhanced chemical vapor deposition: structural modifications investigated by X-ray photoelectron spectrometry and Raman spectroscopy, DIAM RELAT, 10(3-7), 2001, pp. 910-914

Authors: Freire, FL da Costa, MEHM Jacobsohn, LG Franceschini, DF

Citation: Fl. Freire et al., Film growth and relationship between microstructure and mechanical properties of a-C : H : F films deposited by PECVD, DIAM RELAT, 10(2), 2001, pp. 125-131

Authors: Jacobsohn, LG Franceschini, DF da Costa, MEHM Freire, FL

Citation: Lg. Jacobsohn et al., Structural and mechanical characterization of fluorinated amorphous-carbonfilms deposited by plasma decomposition of CF4-CH4 gas mixtures, J VAC SCI A, 18(5), 2000, pp. 2230-2238