Authors:
de Nivelle, MJME
Bruijn, MP
de Korte, PAJ
Sanchez, S
Elwenspoek, M
Heidenblut, T
Schwierzi, B
Michalke, W
Steinbeiss, E
Citation: Mjme. De Nivelle et al., High-T-c bolometers with silicon-nitride spiderweb suspension for far-infrared detection, IEEE APPL S, 9(2), 1999, pp. 3350-3353