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Results:
1-3
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Results: 3
NIR diode laser based process control for industrial CVD reactors
Authors:
Hopfe, V Sheel, DW Raisbeck, D Rivero, JM Graehlert, W Throl, O van Mol, AMB Spee, CIMA
Citation:
V. Hopfe et al., NIR diode laser based process control for industrial CVD reactors, J PHYS IV, 11(PR3), 2001, pp. 1153-1159
Vapor pressures of precursors for the CVD of titanium nitride and tin oxide
Authors:
van Mol, AMB Driessen, JPAM Linden, JL de Croon, MHJM Spee, CIMA Schouten, JC
Citation:
Amb. Van Mol et al., Vapor pressures of precursors for the CVD of titanium nitride and tin oxide, CHEM VAPOR, 7(3), 2001, pp. 101-104
Kinetic mechanism of the decomposition of dimethyltin dichloride
Authors:
van Mol, AMB de Croon, MHJM Spee, CIMA Schouten, JC
Citation:
Amb. Van Mol et al., Kinetic mechanism of the decomposition of dimethyltin dichloride, J PHYS IV, 9(P8), 1999, pp. 165-172
Risultati:
1-3
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