01722nas a2200337 a 4500001001200000003000800012005001700020007000300037008004100040022001400081024002000095024002500115035002000140040000900160044001300169080000800182080000600190082001400196082000900210222004300219245004300262260004600305264042600351264004200777710005800819785009300877785010700970776007401077856010201151856013101253itacnp31735IT-ACNP20260402070000.0ta920519 19641982usab  p             engta  a0022-53557 aP 000461192CNR7 aitacnp317352IT-ACNP  a(ISSN)0022-5355  aacnp  ausacUSA  a669  a6  a621.55/05  aNULL 0aJournal of vacuum science & technology00aJournal of vacuum science & technology  aWashingtonbAmerican Institute of Physics 2cData export is allowed to ACNP participating libraries for institutional purposes and to individuals for personal, non-commercial uses only. Please contact the Bologna University ACNP Team ( acnp.sba.unibo.it/chi-siamo/staff-acnp ) to request permission to use exported data outside the scope of the above license, including but not limited to republication to a group or republishing the website or parts of the website. 4bUniversità di Bolognaccopyright20260 aAmerican Vacuum Society;American Institute of Physics16tJournal of vacuum science & technology. A. Vacuum, surfaces, and filmsw53907x0734-210116tJournal of vacuum science & technology. B, Microelectronics processing and phenomenaw53908x0734-211X1 tJournal of vacuum science and technology (Online)w2738385x2331-175440aacnp.unibo.itnACNP Italian Union Catalogue of Serialsuhttps://acnpsearch.unibo.it/journal/3173540aacnp.sba.unibo.it/nARPAC Area Patrimonio Culturale - Università di Bolognamacnp.support@unibo.ituhttps://acnp.sba.unibo.it