High quality BaTiO3 thin films have been epitaxially grown on SrTiO3 (
100) substrates by pulsed laser deposition (PLD) using a single crysta
l target. The BaTiO3/YBa2Cu3O7 bilayer structures have also been grown
on LaAlO3(100) substrate by PLD for ferroelectric thin film devices.
All the two kinds of thin films were analysed by x-ray diffraction, hi
gh resolution transmission electron microscopy and scanning electron m
icroscopy.