PREPARATION AND STRUCTURE OF PBZRO3 FILMS BY KRF PULSED-LASER DEPOSITION

PbZrO3(PZ) thin films crystallization by rapid thermal annealing (RTA) was studied using Raman-scattering spectroscopy, and the results were compared with those of x-ray diffraction(XRD) result. It was found to be strongly affected the kinetics of subsequent amorphous-perovskite crystallization by RTA temperature. The use of such post anneals allow ed to make films of reproducible microstructure and texture [both (221 ) and (240)] prepared by RTA. The low frequency (<200 cm(-1)) Raman pe aks for the PZ film disappear and three new Raman peaks occur at the 8 3 cm(-1), 138 cm(-1), 273 cm(-1) respectively.