Piezoelectric scanning electron acoustic microscope(SEAM) has been bui
lt in our lab, which is a new technique to nondestructive materials an
alysis. Physical process of electron acoustic imaging was briefly desc
ribed. Some electron acoustic photographs for different materials were
presented. It demonstrates that SEAM has important potential applicat
ions to study of interface features of coating or film like materials,
residual stress distribution, detection of subsurface features. Some
results were first reported in this paper.