THE DECREASE OF DISSOLUTION RATE IN UNEXP OSED AREAS OF CHEMICALLY AMPLIFIED 3-COMPONENT RESIST BY MEANS OF T-BUTYL CARBOXYL ESTER AS A DISSOLUTION INHIBITOR
H. Horibe, THE DECREASE OF DISSOLUTION RATE IN UNEXP OSED AREAS OF CHEMICALLY AMPLIFIED 3-COMPONENT RESIST BY MEANS OF T-BUTYL CARBOXYL ESTER AS A DISSOLUTION INHIBITOR, Kobunshi ronbunshu, 53(11), 1996, pp. 737-744