THE DECREASE OF DISSOLUTION RATE IN UNEXP OSED AREAS OF CHEMICALLY AMPLIFIED 3-COMPONENT RESIST BY MEANS OF T-BUTYL CARBOXYL ESTER AS A DISSOLUTION INHIBITOR

Authors
HORIBE H
Citation
H. Horibe, THE DECREASE OF DISSOLUTION RATE IN UNEXP OSED AREAS OF CHEMICALLY AMPLIFIED 3-COMPONENT RESIST BY MEANS OF T-BUTYL CARBOXYL ESTER AS A DISSOLUTION INHIBITOR, Kobunshi ronbunshu, 53(11), 1996, pp. 737-744
Citations number
14
Categorie Soggetti
Polymer Sciences
Journal title
Kobunshi ronbunshu → ACNP
ISSN journal
03862186
Volume
53
Issue
11
Year of publication
1996
Pages
737 - 744
Database
ISI
SICI code
0386-2186(1996)53:11<737:TDODRI>2.0.ZU;2-#