PREPARATION AND CHARACTERISTICS OF PB(ZR,TI)O-3 THIN-FILMS ON PT ELECTRODE BY RF MAGNETRON SPUTTERING

Lead zirconate titanate (PZT) thin films had been preparaed by rf magn etron sputtering. The perovskite PZT thin films were obtained by annea ling at 500 degrees C for 1 hour. Based on the indentification of the diffraction peak (d=2.50), the possible PZT solid solution fomation me chanism was discussed. The developed ferroelectric tester can sample, transfer, save and output the results about the properties of thin fil ms. Ferroelectric hysteresis loops showed a remanent polarization of 2 4.8 mu C/ cm(2) and a coercive field of 45kV/cm. Fatigue measurements showed that the PZT thin films were stable up to 4 x 10(8) cycles. The interface heterojunction effects of ferroelectric thin films on Pt el ectrode on the hysteresis loops and fatigue characteristics were discu ssed.