EARLY STAGES OF ION-BEAM-SPUTTER DEPOSITION OF FILMS OF PB-TI-O SYSTEM

Authors
SVIRIDOV EV XIAO DQ PENG WB ZHU JG
Citation
Ev. Sviridov et al., EARLY STAGES OF ION-BEAM-SPUTTER DEPOSITION OF FILMS OF PB-TI-O SYSTEM, Ferroelectrics, 195(1-4), 1997, pp. 221-224
Citations number
4
Categorie Soggetti
Physics, Condensed Matter","Material Science
Journal title
Ferroelectrics → ACNP
ISSN journal
00150193
Volume
195
Issue
1-4
Year of publication
1997
Pages
221 - 224
Database
ISI
SICI code
0015-0193(1997)195:1-4<221:ESOIDO>2.0.ZU;2-K
Abstract
Early stages of film deposition by reactive ion-beam sputtering of Pb and Ti targets were studied. Nucleation peculiarities of the sputtered films are considered within the framework of condensation theory deve loped for thermally evaporated films. The arc-effect on the result of film growth is also discussed.