Bi4Ti3O12 this films with (001) preferred orientation were prepared on
Si (100) Substrate by APMOCVD and RTA. The dielectric constant is 138
at room temperature, the Curie temperature is about 680 degrees C. Th
e room temperature resistivities were in the range 10(10)-10(13)Ohm.cm
. At low field the film exhibits Ohmic behavior and at high field the
space-charge-limited-current conduction is the dominant charge transpo
rt mechanism.