Lead titanate thin films were prepared on platinum-coated silicon subs
trates by a modified sol-gel method. The working solution was synthesi
zed by mixing lead acetate trihydrate and tetrabutyl titanate with sol
vent and catalyst at room temperature without using the fluxing proces
s. The effects of film lead content and processing variable including
annealing temperature and heating time during rapid thermal annealing
on structures and ferroelectric properties were investigated.