METHOD OF DETERMINING THE RELATIVE SENSITIVITY OF THERMAL VACUUM GAUGES TO DIFFERENT GASES

A new method is described for determining the relative sensitivity of thermal vacuum gages and their sensors (tranducers) to different gases . The method is based on compensation for the change in the transducer signal caused by the use of a gas other than nitrogen or air and by v ariation of the volume of the measurement chamber. This approach makes it possible to avoid some of the errors intrinsic to measurements of low pressures and small increments in the transducer signal. A vacuum system configuration that allows the given method to be realized is de scribed.