FULL-DIMENSIONAL MONTE-CARLO SIMULATION OF GLOW-DISCHARGES WITH SUPERPOSED MAGNETIC-FIELDS

A Monte Carlo simulation code is described that is suitable for modell ing low-pressure glow discharges that possess cylindrical symmetry, bu t are of otherwise completely variable geometry. In this single-partic le simulation in 3 space and 3 velocity dimensions, an entire discharg e including the cathode fall can be modelled with or without magnetic fields of arbitrary shape. Electric and magnetic fields are given exte rnally and are not adjusted self-consistently. Collision processes are modelled in great detail, and cathode sputtering phenomena are also i ncluded in the simulation. This simulation code is applied to hollow c athode discharges with and without superimposed magnetic fields and to a Penning discharge. Exemplary results are shown that include density profiles of cathode-sputtered atoms, energy distribution functions of electrons and cathode sputtering effects for a Penning discharge. Com parisons to results from experiment and other simulations are given.