EFFECT OF NITROGEN PARTIAL-PRESSURE ON THE SURFACE-MORPHOLOGY AND PROPERTIES OF REACTIVE DC MAGNETRON-SPUTTERED (TI,AL)N COATINGS

Authors
WUHRER R KIM S YEUNG WY
Citation
R. Wuhrer et al., EFFECT OF NITROGEN PARTIAL-PRESSURE ON THE SURFACE-MORPHOLOGY AND PROPERTIES OF REACTIVE DC MAGNETRON-SPUTTERED (TI,AL)N COATINGS, Scripta materialia, 37(8), 1997, pp. 1163-1169
Citations number
13
Categorie Soggetti
Material Science","Metallurgy & Metallurigical Engineering
Journal title
Scripta materialia → ACNP
ISSN journal
13596462
Volume
37
Issue
8
Year of publication
1997
Pages
1163 - 1169
Database
ISI
SICI code
1359-6462(1997)37:8<1163:EONPOT>2.0.ZU;2-X