STUDY OF SOLID-SURFACES BY METASTABLE ELECTRON-EMISSION MICROSCOPY - ENERGY-FILTERED IMAGES AND LOCAL ELECTRON-SPECTRA AT THE OUTERMOST SURFACE-LAYER OF SILICON-OXIDE ON SI(100)
S. Yamamoto et al., STUDY OF SOLID-SURFACES BY METASTABLE ELECTRON-EMISSION MICROSCOPY - ENERGY-FILTERED IMAGES AND LOCAL ELECTRON-SPECTRA AT THE OUTERMOST SURFACE-LAYER OF SILICON-OXIDE ON SI(100), Journal of applied physics, 82(6), 1997, pp. 2954-2960
We have observed images and local electron spectra of an oxide pattern
on Si(100) using metastable electron emission microscopy (MEEM) recen
tly developed at our laboratory. Low-energy electron microscopy (LEEM)
was also used. For both MEEM and LEEM, the energy-filtered images wer
e obtained for the first time. It was shown that MEEM gives the inform
ation on the outermost surface layer selectively, while LEEM provides
averaged information on several surface layers, The intensity of the b
and in the local electron spectrum of MEEM can be related to the distr
ibution of the relevant orbitals exposed outside the surface, with whi
ch metastable atoms interact effectively. Thus, using energy-filtered
MEEM, we can observe the map reflecting the distribution of individual
orbitals at the outermost surface layer. (C) 1997 American Institute
of Physics.