EFFECT OF CRYSTAL-STRUCTURE ON OPTICAL-PROPERTIES OF TIO2 FILMS GROWNBY ATOMIC LAYER DEPOSITION

Authors
AARIK J AIDLA A KIISLER AA UUSTARE T SAMMELSELG V
Citation
J. Aarik et al., EFFECT OF CRYSTAL-STRUCTURE ON OPTICAL-PROPERTIES OF TIO2 FILMS GROWNBY ATOMIC LAYER DEPOSITION, Thin solid films, 305(1-2), 1997, pp. 270-273
Citations number
16
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
305
Issue
1-2
Year of publication
1997
Pages
270 - 273
Database
ISI
SICI code
0040-6090(1997)305:1-2<270:EOCOOO>2.0.ZU;2-U
Abstract
The dependence of optical characteristics on the structure of atomic-l ayer-deposited titania (TiO2) thin films is studied. Amorphous films g rown at 100 degrees C have an optical band gap of 3.3 eV while the ref ractive index values of these films range from 2.2 to 2.3 at a wavelen gth of 633 nm. The refractive index can be increased up to 2.65 by usi ng the growth temperatures about 300 degrees C. Composition and struct ure studies reveal that the formation of preferentially oriented cryst al (anatase) structure contributes to this increase of refractive inde x most significantly. (C) 1997 Elsevier Science S.A.