S. Maeda et al., TEMPERATURE-VARIATIONS OF THE SURFACE OF A SILICON MELT DYE TO EVAPORATION OF CHEMICAL-SPECIES .1. ANTIMONY ADDITION, Journal of the Electrochemical Society, 144(9), 1997, pp. 3185-3188
The influence of antimony addition on the temperature of the silicon m
elt surface was studied. It was found that the temperature of the sili
con melt surface in a quartz crucible decreased due to evaporation of
antimony oxide. This tendency was more pronounced under low pressure i
n the chamber. In the cases of less amount of antimony addition, the t
emperature variations were ambiguous. An approximate estimate for the
latent heat of evaporation of species from the silicon melt surface wa
s carried out based on our experimental results. The preliminary estim
ated result for the latent heat of evaporation of species was in the r
ange of 110 to 170 kJ/mol.