TEMPERATURE-VARIATIONS OF THE SURFACE OF A SILICON MELT DYE TO EVAPORATION OF CHEMICAL-SPECIES .1. ANTIMONY ADDITION

The influence of antimony addition on the temperature of the silicon m elt surface was studied. It was found that the temperature of the sili con melt surface in a quartz crucible decreased due to evaporation of antimony oxide. This tendency was more pronounced under low pressure i n the chamber. In the cases of less amount of antimony addition, the t emperature variations were ambiguous. An approximate estimate for the latent heat of evaporation of species from the silicon melt surface wa s carried out based on our experimental results. The preliminary estim ated result for the latent heat of evaporation of species was in the r ange of 110 to 170 kJ/mol.