Gv. Dubrovskii et Vv. Kozachek, A MODEL OF THE DETAILED KINETICS OF THIN-FILM GROWTH, Colloid journal of the Russian Academy of Sciences, 56(3), 1994, pp. 293-298
A microscopic model, proposed earlier [1, 2], for thin film growth fro
m a gas phase on a solid substrate is developed. In the case of the is
othermal kinetics of structureless particles, the exact equilibrium so
lution for the ideal adsorbate is found, the effect of lateral interac
tions is studied in the mean-field approximation, the quasi-equilibriu
m solution of the model is analyzed, and calculations of the profile o
f the growing film are performed for different cases.