LARGE-AREA MULTIARC ION-BEAM SOURCE MAIS

A pulsed large-area intense ion beam source is described in which the ion-emitting plasma is built up by an array of individual discharge un its homogeneously distributed over the surface of a common discharge e lectrode, A particularly advantageous feature of the source is that fo r plasma generation and subsequent acceleration of the ions, only one common energy supply is necessary. This allows us to simplify the sour ce design and provides inherent synchronization of plasma production a nd ion extraction, Results of investigations of the source performance for the production of a proton beam are presented, The maximum beam c urrent achieved to date is on the order of 100 A, with a particle kine tic energy of 15-30 keV and a pulse length in the range of 10 mu s. Or iginally conceived for the production of proton beams, the source has recently been modified to allow the production of a metal ion beam, Fi rst tests using tungsten ions delivered encouraging results, Future ac tivities will concentrate on the use of alternative-metal ions, carbon ions, and beams composed of mixed ion species.