E. Bonnotte et al., 2 INTERFEROMETRIC METHODS FOR THE MECHANICAL CHARACTERIZATION OF THIN-FILMS BY BULGING TESTS - APPLICATION TO SINGLE-CRYSTAL OF SILICON, Journal of materials research, 12(9), 1997, pp. 2234-2248
Two optical methods are presented for the mechanical characterization
of thin films, namely real time holographic interferometry and a fring
e projection method called ''contouring.'' These two methods are coupl
ed to the interferometry by the phase measurements, thus allowing the
displacement field to be measured at all points on the membrane. We di
scuss the solutions retained in terms of their precision and sensitivi
ty. These methods are then applied to membrane bulging tests, a type o
f test that is widely used in micro-mechanical studies. The measuremen
ts are performed on silicon single crystal and the results are compare
d to the solutions calculated by finite element methods. In both cases
, the good agreement between theory and experiments allows the experim
ental apparatus to be validated.