NOVEL METHOD OF NUCLEAR MICROPROBE BEAM PROFILE DETERMINATION

Citation
Cl. Churms et al., NOVEL METHOD OF NUCLEAR MICROPROBE BEAM PROFILE DETERMINATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 130(1-4), 1997, pp. 70-73
Citations number
5
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
ISSN journal
0168583X
Volume
130
Issue
1-4
Year of publication
1997
Pages
70 - 73
Database
ISI
SICI code
0168-583X(1997)130:1-4<70:NMONMB>2.0.ZU;2-Y
Abstract
A simple method to directly determine the nuclear microprobe beam prof ile is described. Whereas the accuracy of the method can be drasticall y reduced by the alignment of the test specimen, secondary electron em ission was used to determine the precise specimen orientation. The res ulting technique was used for both accurate beam size and profile dete rminations. (C) 1997 Elsevier Science B.V.