ION-BEAM-INDUCED DAMAGE IN INP DURING HEAVY-ION ELASTIC RECOIL DETECTION ANALYSIS

Heavy-Ion Elastic Recoil Detection Analysis (HIERDA) is an analytical technique which has undergone rapid development in the past few years with the availability of high-energy Tandem accelerators for materials science applications. HIERDA has found application in the study of va rious semiconductor systems, particularly III-V compounds. The techniq ue employs a high-energy heavy-ion analysing beam to knock constituent nuclei from the target material and a time of flight and energy (ToF- E) detector system to extract mass and depth of origin information fro m these recoiling nuclei. Present work examines the sample damage prod uced in InP under typical analysis conditions. The depth distribution of damage induced by an I-127 analysing beam of varying energy (54-98 MeV) and dose (10(13)-2x10(14) ions/cm(2)) in InP has been examined us ing RBS channelling, and cross-sectional TEM.