IMPROVED HIGH-ENERGY MICROBEAM TECHNIQUES

Authors
KUMAR A HABERL A BAKHRU H ROUT B
Citation
A. Kumar et al., IMPROVED HIGH-ENERGY MICROBEAM TECHNIQUES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 130(1-4), 1997, pp. 219-223
Citations number
1
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
130
Issue
1-4
Year of publication
1997
Pages
219 - 223
Database
ISI
SICI code
0168-583X(1997)130:1-4<219:IHMT>2.0.ZU;2-T
Abstract
The University at Albany ion scanning microprobe has been used for man y industrial applications in thin films. Of prime importance for rapid analysis, the beam should be set-up and in-use very shortly after the beam is turned on. Rapid optical and electronic tune-up methods are d iscussed. Standard 1-2 micron, 2 MeV helium or proton beams are genera lly used with RBS (Rutherford Backscattering) and PIXE (Particle Induc ed X-ray Emission) to obtain composition analysis in one-or two-dimens ions. We demonstrate the use of 3-dimensional analysis in thin films, wherein film thickness is the third dimension.