HIGH-ENERGY RESOLUTION PIXE WITH HIGH-EFFICIENCY USING THE HEAVY-ION MICROBEAM

An X-ray crystal spectrometer using a position sensitive proportional counter combined with tandem microbeam line at Osaka National Research Institute have been developed. This system realizes high energy resol ution PIXE analysis using a heavy ion microbeam (E < 6 MeV) with reaso nable detection efficiency. The design of the spectrometer, such as de tection geometry, detectable energy range and energy resolution, are d escribed. This system was applied to high energy resolution PIXE analy sis of Ti, SUS and Si with 2 MeV proton and 5 MeV Si3+ focused or coll imated beams. The best energy resolution was 2 eV for the SiK alpha li ne. (C) 1997 Elsevier Science B.V.