ACCURACY OF BEAM POSITIONING IN TIARA

A beam scanning and target profiling technique that provides precise a nd easy beam positioning on samples has been established for the light ion and heavy ion microbeam systems in TIARA of JAERI. The beam posit ioning accuracy in these systems was measured using nuclear track dete ctors, CR-39's. The beam positioning accuracy and indirect beam positi oning technique in the heavy ion microbeam system enabled extremely lo w current microbeam to hit targeted virgin points in micro-structure s emiconductor test samples for study of single event upset (SEU) transi ent current properties. This paper gives details of the beam scanning and target profiling system, and describes and discusses the experimen ts by using this system. (C) 1997 Elsevier Science B.V.