H. Busch et al., PREPARATION AND PROPERTIES OF SEGMENTED FE TARGETS FOR TRANSIENT-FIELD MEASUREMENTS, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 397(1), 1997, pp. 105-109
Multi-layered targets, consisting of segmented layers of Mg and ferrom
agnetic Fe on a thick Cu backing, have been prepared for transient-fie
ld experiments. The segmentation of 50 x 50 mu m squares or circles of
50 mu m diameter was achieved applying the technique of photolithogra
phy and ion etching with Ar ions of 800 eV. The 10 mu m thick Cu backi
ng provided the mechanical support of the segmented structure.