AN UHV BOX COATER FOR VUV REFLECTIVE COATINGS ON MIRROR SUBSTRATES OFUP TO 95 CM IN DIAMETER

Authors
MAIERKOMOR P BERGMAIER A DOLLINGER G FRIESE J KARSCH S KIENLE P KORNER HJ
Citation
P. Maierkomor et al., AN UHV BOX COATER FOR VUV REFLECTIVE COATINGS ON MIRROR SUBSTRATES OFUP TO 95 CM IN DIAMETER, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 397(1), 1997, pp. 194-199
Citations number
11
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
397
Issue
1
Year of publication
1997
Pages
194 - 199
Database
ISI
SICI code
0168-9002(1997)397:1<194:AUBCFV>2.0.ZU;2-O
Abstract
Large mirrors with excellent reflectivity in the vacuum ultraviolet (V UV) range down to 140 nm are needed for large area RICK detectors with CsI photocathodes. This demand can only be fulfilled with a thin homo genous aluminium layer on a substrate with very low surface roughness. Due to the base metal properties of Al an excellent vacuum is require d during the evaporation-condensation process. In addition the Al film needs suitable protective layers on both surfaces. The setup of pilot plants to investigate deposition parameters are described and the des ign of an appropriate box coater is presented.