HIGH-SPATIAL-RESOLUTION QUANTITATIVE MICROWAVE IMPEDANCE MICROSCOPY BY A SCANNING TIP MICROWAVE NEAR-FIELD MICROSCOPE

Authors
GAO C WEI T DUEWER F LU YL XIANG XD
Citation
C. Gao et al., HIGH-SPATIAL-RESOLUTION QUANTITATIVE MICROWAVE IMPEDANCE MICROSCOPY BY A SCANNING TIP MICROWAVE NEAR-FIELD MICROSCOPE, Applied physics letters, 71(13), 1997, pp. 1872-1874
Citations number
6
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
71
Issue
13
Year of publication
1997
Pages
1872 - 1874
Database
ISI
SICI code
0003-6951(1997)71:13<1872:HQMIMB>2.0.ZU;2-V
Abstract
A recently developed scanning tip microwave near-field microscope has been improved to achieve a spatial resolution of 100 nm (similar to la mbda/10(6)). Furthermore, explicit calculations of the field distribut ion using a simplified model allow quantitative microscopy of dielectr ic properties for dielectric materials. A detection sensitivity of del ta epsilon/epsilon similar to 6x10(-4) has been achieved. (C) 1997 Ame rican Institute of Physics.