SIO2 SI(100) MODEL SUPPORT WITH AES AND XPS IN COMBINATION WITH MLCFA/

Model supports consisting of a thin layer of SiO2, on a silicon single crystal offer tremendous advantages for the study of heterogeneous ca talysts. Using model supports, the use of angle-resolved and depth pro filing X-ray photoelectron spectroscopy has now become meaningful. The Varimax Promax transformation (VPT) technique for maximum likelihood common factor analysis (MLCFA) has been proposed as an alternative met hod to the traditional transformations. The so-called VPT technique ma kes no use of spectral reference libraries. Both MLCFA and VPT are inc orporated in a factor analysis software package which has been applied , in combination with XPS and AES, to the study of thin layers of SiO2 on Si(100).