NONLINEAR-OPTICAL WAVE-GUIDE FABRICATION BY DIRECT ELECTRON-BEAM IRRADIATION AND THERMAL DEVELOPMENT USING A HIGH T-G POLYMER

A nonlinear optical waveguide fabrication process for use with dye dop ed polymer is described. The ridge-type channel waveguide containing t he chromophores was fabricated by direct electron-beam irradiation. Th e electron beam with an energy of 25 kV and dose of 1000 mu C/cm(2) wa s exposed directly onto the dye doped polymer film, and then thermal d evelopment and corona-poling were performed simultaneously. We could a lso demonstrate the periodically poled nonlinear optical polymer waveg uide on the basis of this new process. (C) 1997 American Institute of Physics.