Ys. Chun et al., GROWTH OF ORDER DISORDER HETEROSTRUCTURES IN GAINP USING A VARIATION IN V/III RATIO/, Journal of electronic materials, 26(10), 1997, pp. 1250-1255
CuPt ordering, resulting in formation of a natural monolayer {111} sup
erlattice, occurs spontaneously during organometallic vapor phase epit
axial growth of Ga0.52In0.48P. The degree of order is found to be a fu
nction of the input partial pressure of the phosphorus precursor (P-p)
during growth. This is thought to be mainly due to the effect of P-p
on the surface reconstruction. A change in order parameter is associat
ed with a change in the bandgap energy. Thus, a practical application
of ordering is the production of a heterostructure by simply changing
the now rate of the P precursor during growth. Examination of transmis
sion electron microscopy data and photoluminescence spectra indicates
that order/ disorder (O/D) (really less ordered on more ordered) and D
/O heterostructures formed by growth using PH3 at a temperature of 620
degrees C are graded over several thousands of Angstrom: The ordered
structure from the lower layer persists into the upper layer. Similar
results were obtained at 620 degrees C when the first layer was grown
using PH3 (V/III = 160) and the second using tertiarybutylphosphine (T
BP) (V/III = 5). The use af a temperature of 670 degrees C to produce
heterostructures using either PH3 or TBP yields a totally different be
havior. Abrupt D/O and O/D heterostructures can be produced by changin
g P-p during the growth cycle. The cause of this difference in behavio
r is not entirely clear. However, it appears to be related to a very s
low change in the surface reconstruction, measured using surface photo
absorption, when the PH3 partial pressure is changed at 620 degrees C
.