With pre-annealed treatments, high density of atomic steps were formed
on the surface of the MgO substrate. The early-stage microstructure o
f YBa2Cu3O7-x thin films was evolved with a step-flow growth mode by p
ulsed laser deposition. On the as-polished MgO substrates the Volmer-W
eber-type island growth mode was dominant. By means of microstrip line
measurement, it was found that the films grown on the pre-annealed su
bstrate not only have a higher critical current densities but also hav
e a lower microwave loss than those of films deposited on as-polished
substrate. The distinction existed even when the deposition condition
were not optimized.