Thin superconducting YBaCuO layers have been formed. by using oxygen i
mplantation. Initial monocrystalline tetragonal YBa2Cu3Ox (x=6.0-6.1)
films 100-150 nn thick were produced by magnetron deposition on SrTiO3
or AL(2)O(3) substrates. They were implanted with 40keV O+ ions up to
the fluence of 6x10(16)cm(-2) at the sample temperature ranging from
20 to 650 degrees C. Samples were covered with a blanket of alpha-C or
MgO. The onset of a superconducting transition in synthesized samples
was up to 87K.