Chemical diffusion of oxygen in a 300nm thick c-axis-oriented YBa2Cu3O
7-delta film, deposited on (100) SrTiO3 by laser ablation, has been st
udied by tracer O-18 and secondary ion mass spectroscopy (SIMS). Based
on the case of semi-infinite diffusion with boundary condition of pre
served surface concentration, D(appa.=)1.02x10(-14) cm(2)/s, the appar
ent chemical diffusion coefficient along the normal to the film surfac
e, was obtained.