OPTIMIZATION OF T-C OF EPITAXIAL GDBACUO GROWTH SUPERCONDUCTING THIN-FILM IN INVERTED CYLINDRICAL SPUTTERING

The superconductive properties of the thin films dependence on the sub strate temperature and sputtering pressure have been systematically in vestigated in this letter. By the optimization of deposition parameter high quality c-axis epitaxial GBCO thin films with T-infinity>92K wer e reproducibly grown. T-c's of the best sample is as high as 93. 2K. T he superconductivity of the thin films was clearly improved by post-an nealing for 2h at 400C with ozone atmosphere.