L. Chen et al., ENHANCEMENT OF SUPERCONDUCTIVITY BY LOW-ENERGY AR ION MILLING IN EPITAXIAL YBA2CU3O7 THIN-FILMS, Physica. C, Superconductivity, 282, 1997, pp. 657-658
Epitaxial YBa2Cu3O7 thin films were etched with low energy Ar ion at r
oom temperature. It was found that, a substantial enhancement of the s
uperconducting transition temperature was obtained at a short time mil
ling for both electrical and magnetic measurement. The X-ray diffracti
on showed that the lattice frame of the sample was nearly unchanged af
ter lower energy Ar ion milling. We suggest that the T-c enchancement
may be caused by the oxygen redistribution at low energy Ar ion millin
g.