S. Afonso et al., FABRICATION TECHNIQUES AND ELECTRICAL-PROPERTIES OF YBA2CU3O7-X MULTILAYERS WITH RF-SPUTTERED AMORPHOUS SIO2 INTERLAYERS, Physica. C, Superconductivity, 282, 1997, pp. 685-686
We have successfully fabricated YBa2Cu3O7-x/YSZ/SiO2/YSZ/YBa2Cu3O7-x m
ultilayer structures on single crystal LaAlO3 (100), substrates. The Y
Ba2Cu3O7-x(YBCO) layers were deposited using pulsed laser ablation (PL
D), the biaxially aligned YSZ (250 nm thick) layers were deposited usi
ng ion beam assisted PLD (IBAD-PLD), and an amorphous SiO2 (1-2 mu m)
layer fabricated via rf sputtering was sandwiched between the YSZ laye
rs. Fabrication techniques and characterization results are reported f
or patterned layers in this work.