A. Gupta et al., EPITAXIAL-GROWTH OF THIN-FILMS OF SRTI1-XRUXO3-DELTA BY PULSED-LASER DEPOSITION, Materials research bulletin, 31(12), 1996, pp. 1463-1470
The pulsed laser deposition technique has been utilized for thin film
synthesis of a continuous series of solid solutions of the end member
perovskite compounds SrTiO3 and SrRuO3. The SrTi1-xRuxO3-d (0 less tha
n or equal to x less than or equal to 1) films are grown epitaxially o
n (100)-oriented SrTiO3 substrates in a low pressure atomic oxygen amb
ient with in situ monitoring using reflection high-energy electron dif
fraction (RHEED). The as-deposited films are cubic or pseudocubic over
the whole composition range with the lattice parameter increasing con
tinuously with increasing Ru4+ substitution. Correspondingly, the resi
stivity evolves from insulating to metallic behavior. The solid soluti
on films are potentially useful as latticed-matched buffer layers for
heteroepitaxial growth, or as barrier layers in tunnel junctions with
controlled resistive properties.