M. Ladeveze et al., SB DOPING OF SI MOLECULAR-BEAM EPITAXIAL LAYERS - INFLUENCE OF THE SUBSTRATE MISORIENTATION, Physical review. B, Condensed matter, 56(12), 1997, pp. 7615-7622
The influence of the misorientation of the surface on the doping of Si
(lll) by Sb under codeposition in a molecular-beam epitaxy chamber is
experimentally evidenced by secondary ion mass spectrometry measuremen
ts. The Sb incorporation presents the same qualitative behavior (it is
almost constant down to a critical temperature, below which it abrupt
ly increases) for flat and misoriented substrates, but with a shift to
wards lower temperature in the latter case. This can be understood in
terms of local equilibrium as the result of the coupling between desor
ption and segregation phenomena during the incorporation process. The
difference between the nominal and vicinal substrates is then ascribed
to the existence of a temperature range [700 degrees C-780 degrees C]
for which desorption essentially concerns Sb atoms adsorbed on step s
ites.