THE USE OF SPUTTERED ZNO PIEZOELECTRIC THIN-FILMS AS BROAD-BAND MICROACTUATORS

Authors
JENKINS DFL CUNNINGHAM MJ VELU G REMIENS D
Citation
Dfl. Jenkins et al., THE USE OF SPUTTERED ZNO PIEZOELECTRIC THIN-FILMS AS BROAD-BAND MICROACTUATORS, Sensors and actuators. A, Physical, 63(2), 1997, pp. 135-139
Citations number
24
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
63
Issue
2
Year of publication
1997
Pages
135 - 139
Database
ISI
SICI code
0924-4247(1997)63:2<135:TUOSZP>2.0.ZU;2-2
Abstract
An actuation system is described which utilizes a single active ZnO pi ezoelectric thin film deposited onto a silicon cantilever. The method for obtaining films for effective actuation by r.f. magnetron sputteri ng is discussed. The actuator has been incorporated into a system whic h enables unwanted vibrations of the cantilever to be cancelled, whils t maintaining the ability simultaneously to deflect the cantilever as required. (C) 1997 Elsevier Science S.A.