Ditch-typed step-edge junctions and rf SQUIDs were fabricated from epi
taxial YBa2Cu3O7 films on SrTiO3 substrates. The ditch on the substrat
e was milled by Ar-ion, using YBCO film and photoresist as masks. The
structure of the SQUIID is a planar square washer. The size of the out
er washer and center hole is 9x9 mm(2) and 200x200 mu m(2) respectivel
y. The voltage-flux modulation was clearly observed at a bias frequenc
y of 150 MHz. At 77 K, a white flux noise of 4.0x10(-4) Phi(0)/Hz(1/2)
and a field resolution of 480 fT/Hz(1/2) have been obtained at 5 Hz.