GENERATION OF SUBMICRON SURFACE GRATINGS ON LINBO3 BY ULTRASHORT UV LASER-PULSES

Authors
CHEN K IHLEMANN J SIMON P BAUMANN I SOHLER W
Citation
K. Chen et al., GENERATION OF SUBMICRON SURFACE GRATINGS ON LINBO3 BY ULTRASHORT UV LASER-PULSES, Applied physics A: Materials science & processing, 65(4-5), 1997, pp. 517-518
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Applied physics A: Materials science & processing → ACNP
ISSN journal
09478396
Volume
65
Issue
4-5
Year of publication
1997
Pages
517 - 518
Database
ISI
SICI code
0947-8396(1997)65:4-5<517:GOSSGO>2.0.ZU;2-7
Abstract
Ablation of submicron surface structures on LiNbO3 by short ultraviole t laser pulses (0.5 ps, 248 nm) is presented. Gratings with a period o f 360 nm and a modulation depth of 80 nm are fabricated on the sample surface by single-laser-shot exposure. The structures are projection i maged by a Schwarzschild objective in air. The modulation depth can be varied by applying multiple-pulse exposure.