POLYSILICON CANTILEVER BEAM USING SURFACE MICROMACHINING TECHNOLOGY FOR APPLICATION IN MICROSWITCHES

Authors
LUCAS S KISSION K PINEL J BONNAUD O
Citation
S. Lucas et al., POLYSILICON CANTILEVER BEAM USING SURFACE MICROMACHINING TECHNOLOGY FOR APPLICATION IN MICROSWITCHES, Journal of micromechanics and microengineering, 7(3), 1997, pp. 159-161
Citations number
2
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
7
Issue
3
Year of publication
1997
Pages
159 - 161
Database
ISI
SICI code
0960-1317(1997)7:3<159:PCBUSM>2.0.ZU;2-4
Abstract
Our project is the realization of monolithic loaded line phase shifter s for hyperfrequency signals supplying planar antennas. Phase shifters include poly-Si microswitches taking the place of the usual PIN diode s. To this aim, undoped polysilicon cantilever beams were produced by surface micromachining. Results on the stress non uniformity and the s tiction problem encountered during the process are reported.