A NOVEL MICROMECHANICAL FLOW CONTROLLER

Authors
VANTOOR MW LAMMERINK TSJ GARDENIERS JGE ELWENSPOEK M MONSMA D
Citation
Mw. Vantoor et al., A NOVEL MICROMECHANICAL FLOW CONTROLLER, Journal of micromechanics and microengineering, 7(3), 1997, pp. 165-169
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
7
Issue
3
Year of publication
1997
Pages
165 - 169
Database
ISI
SICI code
0960-1317(1997)7:3<165:ANMFC>2.0.ZU;2-O
Abstract
A new concept for a micromechanical flow regulator is presented. Regul ation of the flow is achieved using variation of channel length instea d of channel diameter. Several design concepts together with their app lication in fluidic systems are presented. A regulator for biomedical use, as a part of a glaucoma filter implant, has been realized and tes ted.