ANALYTICAL STATIC MODELING AND OPTIMIZATION OF ELECTROSTATIC MICROPUMPS

Having developed a mechanical law with a simple elementary model of me mbrane deflection, we demonstrate the static instability of such a sys tem under electrostatic actuation and provide an analytical solution f or the membrane position. This allows us to highlight the sticking eff ect and the hysteresis phenomenon of the pump strike volume due to the nonlinearity of such excitation. We determine a parameter optimizatio n procedure for the dimensions of the electrostatic actuated membrane in order to achieve maximum volume displacement.