AN ACCELERATION SENSOR IN CMOS-COMPATIBLE TECHNOLOGY FOR INTEGRATION IN COMPLEX-SYSTEMS

Authors
LANG M GLESNER M
Citation
M. Lang et M. Glesner, AN ACCELERATION SENSOR IN CMOS-COMPATIBLE TECHNOLOGY FOR INTEGRATION IN COMPLEX-SYSTEMS, Journal of micromechanics and microengineering, 7(3), 1997, pp. 193-195
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
7
Issue
3
Year of publication
1997
Pages
193 - 195
Database
ISI
SICI code
0960-1317(1997)7:3<193:AASICT>2.0.ZU;2-X
Abstract
The design of an acceleration sensor with an integrated amplifier in C MOS-compatible technology is described. The whole system is fabricated using a standard 1.0 mu m CMOS technology with only one additional mi cromachining fabrication step, avoiding bond steps or CVD of additiona l materials. The sensing element is based on the use of the piezoresis tive effect. The outlook for the use of the acceleration sensor as a s tandard component for microsystems design is anticipated.