M. Lang et M. Glesner, AN ACCELERATION SENSOR IN CMOS-COMPATIBLE TECHNOLOGY FOR INTEGRATION IN COMPLEX-SYSTEMS, Journal of micromechanics and microengineering, 7(3), 1997, pp. 193-195
The design of an acceleration sensor with an integrated amplifier in C
MOS-compatible technology is described. The whole system is fabricated
using a standard 1.0 mu m CMOS technology with only one additional mi
cromachining fabrication step, avoiding bond steps or CVD of additiona
l materials. The sensing element is based on the use of the piezoresis
tive effect. The outlook for the use of the acceleration sensor as a s
tandard component for microsystems design is anticipated.